What are the advantages of mems?

Answer 1

MEMS are devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate. Many typically have dimensions in the 1 micron to 100 micron range. They have proven to be a key enabling technology of developments in areas such as transportation, telecommunications and health care, but the range of MEMS applications covers nearly every field. The most significant advantage of MEMS is their ability to communicate easily with electrical elements in semiconductor chips. Other advantages include small size, lower power consumption, lower cost, increased reliability and higher precision.

(1)　IC Technology used: Integrated multiple and more complex functions on a chip, to form a monolithic system(sensors+processing+ actuators), Miniaturization with no loss of functionality, Improved Performanc.

(2)　Batch Fabrication: Reduced Manufacturing Cost & Time.

(3)　Microcomponents make the system faster, more reliable, more portable, cheaper, low power consumption, easily & massively employed, easily maintained & replaced.

(4)　Easy to integrate into systems or modify.

(5)　Little harm to environment and capable of incorporating.

(6)　Exploitation of new physics domains.