density
2.0-2.3 gm/cm3
electrical conductivity
varies widely
breakdown field
>1E7 V/cm in thermal oxides; can be as low as 1E6 V/cm in CVd oxides
thermal conductivity
0.01 W/cm K (bulk)
thermal diffusivity
0.009 cm2/sec (bulk)
coefficient of thermal expansion
0.5 ppm/ K [note Si thermal exp 2.3 ppm/K]
refractive index
1.46 [thermal oxide]
dielectric constant
3.9 [thermal oxide]; CVD oxides vary widely depending on H